Effect of Growth Pressure on Structural Properties of SiC Film Grown on Insulator by Utilizing Graphene as a Buffer Layer
Article
info
application/pdf
eJournal
oleh
Astuti, Budi
,
Abd Rahman, Shaharin Fadzli
,
Tanikawa, Masahiro
,
Mahmood, Mohamad Rusop
,
Yasui, Kanji
,
Manaf Hashim, Abdul
|
Terbitan |
: Faculty of Science and Technology, State Islamic University Walisongo Central Java, 2015 |
| Institusi |
:
Universitas Islam Negeri Walisongo Semarang |
| Gedung |
:
|
