Direct patterning of periodic semiconductor nanostructures using single-pulse nanosecond laser interference
| Main Authors: | Wang, Yun-Ran, Hopkinson, Mark |
|---|---|
| Format: | Article eJournal |
| Bahasa: | ang |
| Terbitan: |
, 2020
|
| Subjects: | |
| Online Access: |
https://zenodo.org/record/4106523 |
| ctrlnum |
4106523 |
|---|---|
| fullrecord |
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<dc schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><creator>Wang, Yun-Ran</creator><creator>Hopkinson, Mark</creator><date>2020-10-19</date><description>We demonstrate an effective method for fabricating large area periodic two-dimensional semiconductor nanostructures by means of single-pulse laser interference. Utilizing a pulsed nanosecond laser with a wavelength of 355 nm, precisely ordered square arrays of nanoholes with a periodicity of 300 nm were successfully obtained on UV photoresist and also directly via a resist-free process onto semiconductor wafers. We show improved uniformity using a beam-shaping system consisting of cylindrical lenses with which we can demonstrate highly regular arrays over hundreds of square micrometers. We propose that our novel observation of direct pattern transfer to GaAs is due to local congruent evaporation and subsequent droplet etching of the surface. The results show that single-pulse interference can provide a rapid and highly efficient route for the realization of wide-area periodic nanostructures on semiconductors and potentially on other engineering materials.</description><identifier>https://zenodo.org/record/4106523</identifier><identifier>10.5281/zenodo.4106523</identifier><identifier>oai:zenodo.org:4106523</identifier><language>ang</language><relation>info:eu-repo/grantAgreement/EC/H2020/767285/</relation><relation>doi:10.5281/zenodo.4106522</relation><rights>info:eu-repo/semantics/openAccess</rights><rights>https://creativecommons.org/licenses/by/4.0/legalcode</rights><subject>Lithography, Nanostructuring, MBE, semiconductors, Quantum dots, epitaxy</subject><title>Direct patterning of periodic semiconductor nanostructures using single-pulse nanosecond laser interference</title><type>Journal:Article</type><type>Journal:Article</type><recordID>4106523</recordID></dc>
|
| language |
ang |
| format |
Journal:Article Journal Journal:eJournal |
| author |
Wang, Yun-Ran Hopkinson, Mark |
| title |
Direct patterning of periodic semiconductor nanostructures using single-pulse nanosecond laser interference |
| publishDate |
2020 |
| topic |
Lithography Nanostructuring MBE semiconductors Quantum dots epitaxy |
| url |
https://zenodo.org/record/4106523 |
| contents |
We demonstrate an effective method for fabricating large area periodic two-dimensional semiconductor nanostructures by means of single-pulse laser interference. Utilizing a pulsed nanosecond laser with a wavelength of 355 nm, precisely ordered square arrays of nanoholes with a periodicity of 300 nm were successfully obtained on UV photoresist and also directly via a resist-free process onto semiconductor wafers. We show improved uniformity using a beam-shaping system consisting of cylindrical lenses with which we can demonstrate highly regular arrays over hundreds of square micrometers. We propose that our novel observation of direct pattern transfer to GaAs is due to local congruent evaporation and subsequent droplet etching of the surface. The results show that single-pulse interference can provide a rapid and highly efficient route for the realization of wide-area periodic nanostructures on semiconductors and potentially on other engineering materials. |
| id |
IOS17403.4106523 |
| institution |
Universitas PGRI Palembang |
| institution_id |
189 |
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library:university library |
| library |
Perpustakaan Universitas PGRI Palembang |
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587 |
| collection |
Marga Life in South Sumatra in the Past: Puyang Concept Sacrificed and Demythosized |
| repository_id |
17403 |
| city |
KOTA PALEMBANG |
| province |
SUMATERA SELATAN |
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IOS17403 |
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2022-07-26T01:31:06Z |
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2022-07-26T01:31:06Z |
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1 |
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17.608942 |