Penggunaan Metode DC Magnetron Sputtering dalam Pembuatan Lapisan Tipis Tipe N (AZO) Sebagai Modul Termoelektrik

Main Authors: Irawan, Elysa Nensy; Departemen Fisika, Fakultas Sains, Institut Teknologi Sepuluh Nopember, S. Muntini, Melania; Departemen Fisika, Fakultas Sains, Institut Teknologi Sepuluh Nopember, Mahenda Putra, Aldo; Departemen Fisika, Fakultas Sains, Institut Teknologi Sepuluh Nopember, Seetawan, Tosawat; Thin Film Research Laboratory, Center of Excellence on Alternative Energy, Research and Development Institution, Sakon Nakhon Rajabhat University, Singsoog, Kunchit; Thin Film Research Laboratory, Center of Excellence on Alternative Energy, Research and Development Institution, Sakon Nakhon Rajabhat University, Thawankaew, Somphorn; Thin Film Research Laboratory, Center of Excellence on Alternative Energy, Research and Development Institution, Sakon Nakhon Rajabhat University, Caho-Moo, Watchara; Thin Film Research Laboratory, Center of Excellence on Alternative Energy, Research and Development Institution, Sakon Nakhon Rajabhat University, Vora-Ud, Athorn; Thin Film Research Laboratory, Center of Excellence on Alternative Energy, Research and Development Institution, Sakon Nakhon Rajabhat University
Format: Article info application/pdf eJournal
Bahasa: eng
Terbitan: Lembaga Penelitian dan Pengabdian Kepada Masyarakat (LPPM), ITS , 2019
Subjects:
Online Access: http://ejurnal.its.ac.id/index.php/sains_seni/article/view/41915
http://ejurnal.its.ac.id/index.php/sains_seni/article/view/41915/5506
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http://ejurnal.its.ac.id/index.php/sains_seni/article/downloadSuppFile/41915/11774