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Characterization of 1D Grating Standard for National Laboratory Comparison Using Scanning Electron Microscope

Article info application/pdf Journal

oleh Nugraha, Asep Ridwan; Puslit Metrologi LIPI , Rahman, Ardi; Puslit Metrologi LIPI , Trisna, Beni Adi; Puslit Metrologi LIPI

Terbitan	: LIPI Press, Anggota IKAPI, 2019
Institusi	: Badan Standardisasi Nasional
Gedung	:

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Lokasi	Repository	IOS Number
		IOS15518.article-159

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