Low temperature metal-organic chemical vapor deposition of tungsten nitride as a diffusion barrier for copper
| Main Authors: | Kelsey, Jean E, Goldberg, Cindy, Nuesca, Guillermo, Peterson, Greg, Kaloyeros, Alain E, Arkles, Barry |
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| Format: | Article Journal |
| Bahasa: | eng |
| Terbitan: |
, 1999
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| Subjects: | |
| Online Access: |
https://zenodo.org/record/3783822 |
Internet
https://zenodo.org/record/3783822Lokasi
| Koleksi | Cognizance Journal of Multidisciplinary Studies |
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| Gedung | Cognizance Journal of Multidisciplinary Studies |
| Institusi | ZAIN Publications |
| Kota | Stockholm |
| Provinsi | INTERNASIONAL |
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