Fabrication of biopolymer cantilevers

Main Authors: Feidenhans'l, Nikolaj, Fisker-Bødker, Nis
Other Authors: Keller, Stephan
Format: Proceeding eJournal
Terbitan: , 2010
Subjects:
NIL
RIE
Online Access: https://zenodo.org/record/3536542
ctrlnum 3536542
fullrecord <?xml version="1.0"?> <dc schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><contributor>Keller, Stephan</contributor><creator>Feidenhans'l, Nikolaj</creator><creator>Fisker-B&#xF8;dker, Nis</creator><date>2010-06-25</date><description>With our novel production method biopolymer micro cantilevers can be manufactured cheap and easily, rendering the measurement of degradability a matter of a few days. Our micro cantilevers are made of the PLLA (poly-l-lactide), measure 100 x 500 x 10 &#xB5;m (width, length, height) but are positioned on a supporting body chip to allow handling with tweezers. As biopolymers are to fragile to process with standard silicon techniques we developed a fabrication method using nanoimprint lithography, where the chip structure is defined by pressing a stamp into the biopolymer layer. This has previously only been done with ordinary plastics. The degradation is then evaluated by placing the chip in a solution and measuring its resonance frequency, which depend on the cantilever mass. As proof of concept this measurement was also performed.</description><identifier>https://zenodo.org/record/3536542</identifier><identifier>10.4122/1.1000000121</identifier><identifier>oai:zenodo.org:3536542</identifier><relation>info:eu-repo/semantics/altIdentifier/doi/10.4122/1.1000000122</relation><relation>url:https://zenodo.org/communities/dtuproceedings</relation><relation>url:https://zenodo.org/communities/gd2010</relation><rights>info:eu-repo/semantics/openAccess</rights><rights>https://creativecommons.org/licenses/by/4.0/legalcode</rights><subject>PLLA</subject><subject>poly-l-lactide</subject><subject>NIL</subject><subject>nano-imprint lithography</subject><subject>microcantilevers</subject><subject>micro cantilevers</subject><subject>degradation</subject><subject>resonance frequency</subject><subject>young's modulus</subject><subject>reactive ion etch</subject><subject>RIE</subject><title>Fabrication of biopolymer cantilevers</title><type>Journal:Proceeding</type><type>Journal:Proceeding</type><recordID>3536542</recordID></dc>
format Journal:Proceeding
Journal
Journal:eJournal
author Feidenhans'l, Nikolaj
Fisker-Bødker, Nis
author2 Keller, Stephan
title Fabrication of biopolymer cantilevers
publishDate 2010
isbn 9781000000122
topic PLLA
poly-l-lactide
NIL
nano-imprint lithography
microcantilevers
micro cantilevers
degradation
resonance frequency
young's modulus
reactive ion etch
RIE
url https://zenodo.org/record/3536542
contents With our novel production method biopolymer micro cantilevers can be manufactured cheap and easily, rendering the measurement of degradability a matter of a few days. Our micro cantilevers are made of the PLLA (poly-l-lactide), measure 100 x 500 x 10 μm (width, length, height) but are positioned on a supporting body chip to allow handling with tweezers. As biopolymers are to fragile to process with standard silicon techniques we developed a fabrication method using nanoimprint lithography, where the chip structure is defined by pressing a stamp into the biopolymer layer. This has previously only been done with ordinary plastics. The degradation is then evaluated by placing the chip in a solution and measuring its resonance frequency, which depend on the cantilever mass. As proof of concept this measurement was also performed.
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institution Universitas PGRI Palembang
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collection Marga Life in South Sumatra in the Past: Puyang Concept Sacrificed and Demythosized
repository_id 17403
city KOTA PALEMBANG
province SUMATERA SELATAN
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first_indexed 2022-07-26T01:33:38Z
last_indexed 2022-07-26T01:33:38Z
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