Research on Silicon-based Planar Spiral Inductance Coil Based on Microelectromechanical System
Main Authors: | Li, Gang; Heilongjiang University, Zhao, Xiaofeng; Heilongjiang University, Wen, Dianzhong; Heilongjiang University, Yu, Yang; Heilongjiang University |
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Other Authors: | Key Laboratory of Electronics Engineering, College of Heilongjiang Province, Heilongjiang University |
Format: | Article info application/pdf eJournal |
Bahasa: | eng |
Terbitan: |
Universitas Ahmad Dahlan
, 2015
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Subjects: | |
Online Access: |
http://journal.uad.ac.id/index.php/TELKOMNIKA/article/view/1818 http://journal.uad.ac.id/index.php/TELKOMNIKA/article/view/1818/pdf_254 |