Ch2FCF3 Gas Flow Rate Effects of SiO2 Plasma Etching Rate on Quartz Crystal Microbalance
| Main Authors: | Jalu Permana, Antonius Prisma, Djoko HS, Dionysius Joseph, Masruroh, Masruroh |
|---|---|
| Other Authors: | Advanced System and Material Technology (ASMAT), Brawijaya University, Department of Mathematics and Natural Science |
| Format: | Article info plasma etching application/pdf eJournal |
| Bahasa: | eng |
| Terbitan: |
Natural B
, 2016
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| Subjects: | |
| Online Access: |
http://natural-b.ub.ac.id/index.php/natural-b/article/view/324 http://natural-b.ub.ac.id/index.php/natural-b/article/view/324/pdf |
Internet
http://natural-b.ub.ac.id/index.php/natural-b/article/view/324http://natural-b.ub.ac.id/index.php/natural-b/article/view/324/pdf
Lokasi
| Koleksi | Natural B |
|---|---|
| Gedung | Perpustakaan Universitas Brawijaya |
| Institusi | Universitas Brawijaya |
| Kota | MALANG |
| Provinsi | JAWA TIMUR |
| Kontak | Butuh informasi lebih lanjut? Hubungi pustakawan institusi ini. |