Low temperature inorganic chemical vapor deposition of Ti–Si–N diffusion barrier liners for gigascale copper interconnect applications
| Main Authors: | Eisenbraun, Eric, Upham, Allan, Dash, Raj, Kaloyeros, Alain, Arkles, Barry, Sulllivan, John J, |
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| Format: | Article eJournal |
| Bahasa: | eng |
| Terbitan: |
, 2007
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| Subjects: | |
| Online Access: |
https://zenodo.org/record/3712449 |
Internet
https://zenodo.org/record/3712449Lokasi
| Koleksi | Marga Life in South Sumatra in the Past: Puyang Concept Sacrificed and Demythosized |
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| Gedung | Perpustakaan Universitas PGRI Palembang |
| Institusi | Universitas PGRI Palembang |
| Kota | KOTA PALEMBANG |
| Provinsi | SUMATERA SELATAN |
| Kontak | Butuh informasi lebih lanjut? Hubungi pustakawan institusi ini. |