Area selective ALD of cobalt as mediated by thermally induced dehydrocoupled SAMs
| Main Authors: | Brick, Chad, Arkles, Barry, Goff, Jonathan, Kaloyeros, Alain |
|---|---|
| Format: | Proceeding poster eJournal |
| Bahasa: | eng |
| Terbitan: |
, 2019
|
| Subjects: | |
| Online Access: |
https://zenodo.org/record/4147563 |
| ctrlnum |
4147563 |
|---|---|
| fullrecord |
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<dc schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><creator>Brick, Chad</creator><creator>Arkles, Barry</creator><creator>Goff, Jonathan</creator><creator>Kaloyeros, Alain</creator><date>2019-07-26</date><description>Organic trihydridosilanes provide an elegant route for generating self-assembled monolayers (SAM)s by vapor phase transport on a variety of substrates. Under mild conditions, these precursors can be made to interact with a variety of clean metal and hydrogenated metalloid surfaces such as Ti, Cu, and Si to form near-zero-thickness SAMs. These SAMs can be customized with specific functionality to activate or deactivate subsequent Co deposition on the underlying substrate, leading to area specific Co deposition.</description><identifier>https://zenodo.org/record/4147563</identifier><identifier>10.5281/zenodo.4147563</identifier><identifier>oai:zenodo.org:4147563</identifier><language>eng</language><relation>doi:10.5281/zenodo.4147562</relation><rights>info:eu-repo/semantics/openAccess</rights><rights>https://creativecommons.org/licenses/by/4.0/legalcode</rights><subject>Cobalt</subject><subject>Area Specific Deposition</subject><title>Area selective ALD of cobalt as mediated by thermally induced dehydrocoupled SAMs</title><type>Journal:Proceeding</type><type>Other:poster</type><recordID>4147563</recordID></dc>
|
| language |
eng |
| format |
Journal:Proceeding Journal Other:poster Other Journal:eJournal |
| author |
Brick, Chad Arkles, Barry Goff, Jonathan Kaloyeros, Alain |
| title |
Area selective ALD of cobalt as mediated by thermally induced dehydrocoupled SAMs |
| publishDate |
2019 |
| topic |
Cobalt Area Specific Deposition |
| url |
https://zenodo.org/record/4147563 |
| contents |
Organic trihydridosilanes provide an elegant route for generating self-assembled monolayers (SAM)s by vapor phase transport on a variety of substrates. Under mild conditions, these precursors can be made to interact with a variety of clean metal and hydrogenated metalloid surfaces such as Ti, Cu, and Si to form near-zero-thickness SAMs. These SAMs can be customized with specific functionality to activate or deactivate subsequent Co deposition on the underlying substrate, leading to area specific Co deposition. |
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IOS17403.4147563 |
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Universitas PGRI Palembang |
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189 |
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library:university library |
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Perpustakaan Universitas PGRI Palembang |
| library_id |
587 |
| collection |
Marga Life in South Sumatra in the Past: Puyang Concept Sacrificed and Demythosized |
| repository_id |
17403 |
| city |
KOTA PALEMBANG |
| province |
SUMATERA SELATAN |
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IOS17403 |
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2022-07-26T01:50:18Z |
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2022-07-26T01:50:18Z |
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