Pengaruh laju aliran gas SIH4/GeH4 terhadap karakteristik lapisan tipis (a-SiGe:H) dengan metode PECVD
| Main Author: | AZMI |
|---|---|
| Format: | Bachelors |
| Bahasa: | ind |
| Terbitan: |
FMIPA Unsyiah
, 2005
|
| Online Access: |
http://uilis.unsyiah.ac.id/uilis/index.php?p=show_detail&id=42946 |
| ctrlnum |
slims-42946 |
|---|---|
| fullrecord |
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|
| language |
ind |
| format |
Thesis:Bachelors Thesis |
| author |
AZMI |
| title |
Pengaruh laju aliran gas SIH4/GeH4 terhadap karakteristik lapisan tipis (a-SiGe:H) dengan metode PECVD |
| publisher |
FMIPA Unsyiah |
| publishDate |
2005 |
| url |
http://uilis.unsyiah.ac.id/uilis/index.php?p=show_detail&id=42946 |
| contents |
+hlm.;cm |
| id |
IOS3239.slims-42946 |
| institution |
Universitas Syiah Kuala |
| institution_id |
21 |
| institution_type |
library:university library |
| library |
Perpustakaan Universitas Syiah Kuala |
| library_id |
603 |
| collection |
Katalog Perpustakaan Unsyiah |
| repository_id |
3239 |
| subject_area |
Adat Istiadat Administrasi Negara dan Militer Agama |
| city |
KOTA BANDA ACEH |
| province |
ACEH |
| repoId |
IOS3239 |
| first_indexed |
2016-09-15T18:51:31Z |
| last_indexed |
2016-09-24T07:15:08Z |
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dc |
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1675283943635550208 |
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17.610468 |